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Check Sample Silicon Wafers from Desert Silicon, LLC.

Check Samples

For Calibrating Film Thickness Analyzers

  Desert Silicon, LLC wafer-form film thickness check samples are used for convenient spot checking of Automatic Ellipsometers, NanoSpecs, Reflectometers, and Profilometers. The Desert Silicon check samples are designed as a reference to help on-line Process Engineers isolate day-to-day changes in instrumentation from actual process changes.

  A variety of films are provided on 2-12 inch wafers. Four-inch wafers come in several stock film thicknesses and are also available in a variety of diameters and custom thicknesses. In addition to standard step height materials, Desert Silicon provides LPCVD reference films including Silicon Nitride, Polysilicon (doped or undoped) and SIPOS (semi-insulating polysilicon). PECVD check samples are also available in custom thicknesses, as are metal Films by sputter or evaporation.

  Film thicknesses are highly uniform and a documentation package is provided with each wafer. A certificate of correlation is issued stating precise measurement. Cross correlation is included for three different, highly accurate measurement instruments.

  Traceability to the National Institute of Standards and Technology (formerly National Bureau of Standards) is supplied with the documentation package.


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